JPS62178531U - - Google Patents

Info

Publication number
JPS62178531U
JPS62178531U JP6663086U JP6663086U JPS62178531U JP S62178531 U JPS62178531 U JP S62178531U JP 6663086 U JP6663086 U JP 6663086U JP 6663086 U JP6663086 U JP 6663086U JP S62178531 U JPS62178531 U JP S62178531U
Authority
JP
Japan
Prior art keywords
wafer
semiconductor manufacturing
view
insulating film
center hole
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6663086U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0322912Y2 (US06262066-20010717-C00315.png
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6663086U priority Critical patent/JPH0322912Y2/ja
Publication of JPS62178531U publication Critical patent/JPS62178531U/ja
Application granted granted Critical
Publication of JPH0322912Y2 publication Critical patent/JPH0322912Y2/ja
Expired legal-status Critical Current

Links

JP6663086U 1986-04-30 1986-04-30 Expired JPH0322912Y2 (US06262066-20010717-C00315.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6663086U JPH0322912Y2 (US06262066-20010717-C00315.png) 1986-04-30 1986-04-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6663086U JPH0322912Y2 (US06262066-20010717-C00315.png) 1986-04-30 1986-04-30

Publications (2)

Publication Number Publication Date
JPS62178531U true JPS62178531U (US06262066-20010717-C00315.png) 1987-11-12
JPH0322912Y2 JPH0322912Y2 (US06262066-20010717-C00315.png) 1991-05-20

Family

ID=30904815

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6663086U Expired JPH0322912Y2 (US06262066-20010717-C00315.png) 1986-04-30 1986-04-30

Country Status (1)

Country Link
JP (1) JPH0322912Y2 (US06262066-20010717-C00315.png)

Also Published As

Publication number Publication date
JPH0322912Y2 (US06262066-20010717-C00315.png) 1991-05-20

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