JPS62178529U - - Google Patents
Info
- Publication number
- JPS62178529U JPS62178529U JP6697586U JP6697586U JPS62178529U JP S62178529 U JPS62178529 U JP S62178529U JP 6697586 U JP6697586 U JP 6697586U JP 6697586 U JP6697586 U JP 6697586U JP S62178529 U JPS62178529 U JP S62178529U
- Authority
- JP
- Japan
- Prior art keywords
- reflected light
- light
- etching
- optical fiber
- core
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000013307 optical fiber Substances 0.000 claims description 3
- 239000000758 substrate Substances 0.000 claims description 2
- 238000001312 dry etching Methods 0.000 claims 1
- 238000005530 etching Methods 0.000 claims 1
- 238000012806 monitoring device Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 238000012544 monitoring process Methods 0.000 description 1
Landscapes
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6697586U JPS62178529U (enExample) | 1986-05-06 | 1986-05-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6697586U JPS62178529U (enExample) | 1986-05-06 | 1986-05-06 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62178529U true JPS62178529U (enExample) | 1987-11-12 |
Family
ID=30905467
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6697586U Pending JPS62178529U (enExample) | 1986-05-06 | 1986-05-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62178529U (enExample) |
-
1986
- 1986-05-06 JP JP6697586U patent/JPS62178529U/ja active Pending