JPS62178528U - - Google Patents
Info
- Publication number
- JPS62178528U JPS62178528U JP6664186U JP6664186U JPS62178528U JP S62178528 U JPS62178528 U JP S62178528U JP 6664186 U JP6664186 U JP 6664186U JP 6664186 U JP6664186 U JP 6664186U JP S62178528 U JPS62178528 U JP S62178528U
- Authority
- JP
- Japan
- Prior art keywords
- susceptor
- wafers
- wafer
- forming apparatus
- film forming
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000004308 accommodation Effects 0.000 claims description 2
- 235000012431 wafers Nutrition 0.000 claims 6
- 239000010453 quartz Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6664186U JPS62178528U (OSRAM) | 1986-04-30 | 1986-04-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6664186U JPS62178528U (OSRAM) | 1986-04-30 | 1986-04-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62178528U true JPS62178528U (OSRAM) | 1987-11-12 |
Family
ID=30904836
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6664186U Pending JPS62178528U (OSRAM) | 1986-04-30 | 1986-04-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62178528U (OSRAM) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5285084A (en) * | 1976-01-09 | 1977-07-15 | Hitachi Ltd | Base support |
| JPS5352370A (en) * | 1976-10-25 | 1978-05-12 | Hitachi Ltd | Wafer susceptor |
-
1986
- 1986-04-30 JP JP6664186U patent/JPS62178528U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5285084A (en) * | 1976-01-09 | 1977-07-15 | Hitachi Ltd | Base support |
| JPS5352370A (en) * | 1976-10-25 | 1978-05-12 | Hitachi Ltd | Wafer susceptor |