JPS62178119U - - Google Patents

Info

Publication number
JPS62178119U
JPS62178119U JP6742986U JP6742986U JPS62178119U JP S62178119 U JPS62178119 U JP S62178119U JP 6742986 U JP6742986 U JP 6742986U JP 6742986 U JP6742986 U JP 6742986U JP S62178119 U JPS62178119 U JP S62178119U
Authority
JP
Japan
Prior art keywords
nozzle
injection port
port
foreign matter
communicates
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6742986U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0320098Y2 (me
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6742986U priority Critical patent/JPH0320098Y2/ja
Publication of JPS62178119U publication Critical patent/JPS62178119U/ja
Application granted granted Critical
Publication of JPH0320098Y2 publication Critical patent/JPH0320098Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Injection Moulding Of Plastics Or The Like (AREA)
JP6742986U 1986-05-02 1986-05-02 Expired JPH0320098Y2 (me)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6742986U JPH0320098Y2 (me) 1986-05-02 1986-05-02

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6742986U JPH0320098Y2 (me) 1986-05-02 1986-05-02

Publications (2)

Publication Number Publication Date
JPS62178119U true JPS62178119U (me) 1987-11-12
JPH0320098Y2 JPH0320098Y2 (me) 1991-04-30

Family

ID=30906333

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6742986U Expired JPH0320098Y2 (me) 1986-05-02 1986-05-02

Country Status (1)

Country Link
JP (1) JPH0320098Y2 (me)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014164991A (ja) * 2013-02-25 2014-09-08 Gigaphoton Inc ターゲット供給装置及び極端紫外光生成装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014164991A (ja) * 2013-02-25 2014-09-08 Gigaphoton Inc ターゲット供給装置及び極端紫外光生成装置

Also Published As

Publication number Publication date
JPH0320098Y2 (me) 1991-04-30

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