JPS62178119U - - Google Patents

Info

Publication number
JPS62178119U
JPS62178119U JP6742986U JP6742986U JPS62178119U JP S62178119 U JPS62178119 U JP S62178119U JP 6742986 U JP6742986 U JP 6742986U JP 6742986 U JP6742986 U JP 6742986U JP S62178119 U JPS62178119 U JP S62178119U
Authority
JP
Japan
Prior art keywords
nozzle
injection port
port
foreign matter
communicates
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6742986U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0320098Y2 (https=
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6742986U priority Critical patent/JPH0320098Y2/ja
Publication of JPS62178119U publication Critical patent/JPS62178119U/ja
Application granted granted Critical
Publication of JPH0320098Y2 publication Critical patent/JPH0320098Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Injection Moulding Of Plastics Or The Like (AREA)
JP6742986U 1986-05-02 1986-05-02 Expired JPH0320098Y2 (https=)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6742986U JPH0320098Y2 (https=) 1986-05-02 1986-05-02

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6742986U JPH0320098Y2 (https=) 1986-05-02 1986-05-02

Publications (2)

Publication Number Publication Date
JPS62178119U true JPS62178119U (https=) 1987-11-12
JPH0320098Y2 JPH0320098Y2 (https=) 1991-04-30

Family

ID=30906333

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6742986U Expired JPH0320098Y2 (https=) 1986-05-02 1986-05-02

Country Status (1)

Country Link
JP (1) JPH0320098Y2 (https=)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014164991A (ja) * 2013-02-25 2014-09-08 Gigaphoton Inc ターゲット供給装置及び極端紫外光生成装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014164991A (ja) * 2013-02-25 2014-09-08 Gigaphoton Inc ターゲット供給装置及び極端紫外光生成装置

Also Published As

Publication number Publication date
JPH0320098Y2 (https=) 1991-04-30

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