JPS621780U - - Google Patents

Info

Publication number
JPS621780U
JPS621780U JP9158485U JP9158485U JPS621780U JP S621780 U JPS621780 U JP S621780U JP 9158485 U JP9158485 U JP 9158485U JP 9158485 U JP9158485 U JP 9158485U JP S621780 U JPS621780 U JP S621780U
Authority
JP
Japan
Prior art keywords
substrate
roller
roll coater
transfer device
transfer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9158485U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6236541Y2 (US07345094-20080318-C00003.png
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985091584U priority Critical patent/JPS6236541Y2/ja
Publication of JPS621780U publication Critical patent/JPS621780U/ja
Application granted granted Critical
Publication of JPS6236541Y2 publication Critical patent/JPS6236541Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Coating Apparatus (AREA)
JP1985091584U 1985-06-19 1985-06-19 Expired JPS6236541Y2 (US07345094-20080318-C00003.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985091584U JPS6236541Y2 (US07345094-20080318-C00003.png) 1985-06-19 1985-06-19

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985091584U JPS6236541Y2 (US07345094-20080318-C00003.png) 1985-06-19 1985-06-19

Publications (2)

Publication Number Publication Date
JPS621780U true JPS621780U (US07345094-20080318-C00003.png) 1987-01-08
JPS6236541Y2 JPS6236541Y2 (US07345094-20080318-C00003.png) 1987-09-17

Family

ID=30647604

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985091584U Expired JPS6236541Y2 (US07345094-20080318-C00003.png) 1985-06-19 1985-06-19

Country Status (1)

Country Link
JP (1) JPS6236541Y2 (US07345094-20080318-C00003.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007296462A (ja) * 2006-04-28 2007-11-15 Fujifilm Corp 塗布方法及び装置並びに塗布ライン用ローラ

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5224505A (en) * 1975-08-19 1977-02-24 Matsushita Electric Ind Co Ltd Tape guide
JPS5954563U (ja) * 1982-09-30 1984-04-10 株式会社東芝 現像およびエツチング装置
JPS60103352A (ja) * 1983-11-11 1985-06-07 Tokyo Ohka Kogyo Co Ltd フオトレジスト形成用積層板製造装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5224505A (en) * 1975-08-19 1977-02-24 Matsushita Electric Ind Co Ltd Tape guide
JPS5954563U (ja) * 1982-09-30 1984-04-10 株式会社東芝 現像およびエツチング装置
JPS60103352A (ja) * 1983-11-11 1985-06-07 Tokyo Ohka Kogyo Co Ltd フオトレジスト形成用積層板製造装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007296462A (ja) * 2006-04-28 2007-11-15 Fujifilm Corp 塗布方法及び装置並びに塗布ライン用ローラ

Also Published As

Publication number Publication date
JPS6236541Y2 (US07345094-20080318-C00003.png) 1987-09-17

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