JPS62176488U - - Google Patents

Info

Publication number
JPS62176488U
JPS62176488U JP19839985U JP19839985U JPS62176488U JP S62176488 U JPS62176488 U JP S62176488U JP 19839985 U JP19839985 U JP 19839985U JP 19839985 U JP19839985 U JP 19839985U JP S62176488 U JPS62176488 U JP S62176488U
Authority
JP
Japan
Prior art keywords
pressure
exhaust valve
vacuum pump
exhaust
exhaust pipe
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP19839985U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0229260Y2 (US07754267-20100713-C00021.png
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP19839985U priority Critical patent/JPH0229260Y2/ja
Publication of JPS62176488U publication Critical patent/JPS62176488U/ja
Application granted granted Critical
Publication of JPH0229260Y2 publication Critical patent/JPH0229260Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
JP19839985U 1985-12-25 1985-12-25 Expired JPH0229260Y2 (US07754267-20100713-C00021.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19839985U JPH0229260Y2 (US07754267-20100713-C00021.png) 1985-12-25 1985-12-25

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19839985U JPH0229260Y2 (US07754267-20100713-C00021.png) 1985-12-25 1985-12-25

Publications (2)

Publication Number Publication Date
JPS62176488U true JPS62176488U (US07754267-20100713-C00021.png) 1987-11-09
JPH0229260Y2 JPH0229260Y2 (US07754267-20100713-C00021.png) 1990-08-06

Family

ID=31159050

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19839985U Expired JPH0229260Y2 (US07754267-20100713-C00021.png) 1985-12-25 1985-12-25

Country Status (1)

Country Link
JP (1) JPH0229260Y2 (US07754267-20100713-C00021.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009030595A (ja) * 2007-06-26 2009-02-12 Mitsutoyo Corp 真空排気装置および真空排気方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009030595A (ja) * 2007-06-26 2009-02-12 Mitsutoyo Corp 真空排気装置および真空排気方法

Also Published As

Publication number Publication date
JPH0229260Y2 (US07754267-20100713-C00021.png) 1990-08-06

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