JPS62175657A - Method of measuring gas concentration - Google Patents

Method of measuring gas concentration

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Publication number
JPS62175657A
JPS62175657A JP61019084A JP1908486A JPS62175657A JP S62175657 A JPS62175657 A JP S62175657A JP 61019084 A JP61019084 A JP 61019084A JP 1908486 A JP1908486 A JP 1908486A JP S62175657 A JPS62175657 A JP S62175657A
Authority
JP
Japan
Prior art keywords
concentration
carbon dioxide
current value
gas
measured
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP61019084A
Other languages
Japanese (ja)
Inventor
Toshio Usui
俊雄 臼井
Akiyoshi Asada
浅田 昭良
Mitsuhiro Nakazawa
中沢 光博
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujikura Ltd
Original Assignee
Fujikura Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujikura Ltd filed Critical Fujikura Ltd
Priority to JP61019084A priority Critical patent/JPS62175657A/en
Publication of JPS62175657A publication Critical patent/JPS62175657A/en
Pending legal-status Critical Current

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  • Measuring Oxygen Concentration In Cells (AREA)

Abstract

PURPOSE:To measure concentration of moisture and concentration of a carbon dioxide in gas to be measured simply and quickly, by using a level difference between a flat part, and the bottom part of a trough part of respective voltage-current characteristic curve in a threshold current type oxygen sensor. CONSTITUTION:When measuring the concentration moisture and the concentration of carbon dioxide in a gas to be measured containing water and carbon dioxide, a low voltage V1 is applied to a threshold current type oxygen sensor using a solid electrolyte to obtain a threshold current value 1L1 at a first flat part 12 by oxygen, a high voltage V2 is applied to obtain a threshold current value 1L2 dye to the existence of carbon dioxide and water at a second flat part 13 and further, a higher voltage V3 is applied to obtain a threshold current value 1L3 at the bottom part 14a of the through 14. A differential current value DELTA1L* is determined from the difference (1L3-1L2) between the current values 1L2 and 1L3 and differential current value DELTA1L** is calculated from the difference (1L2-1L3) between the current values 1L2 and 1L3. Thus, when the concentration of water and the concentration of carbon dioxide are previously determined corresponding to the current values DELTA1L* and DELTA1L** respectively, the density of moisture and concentration of carbon dioxide can be determined immediately from the current values DELTA1L* and DELTA1L**.

Description

【発明の詳細な説明】 〈産業上の利用分野〉 本発明は、被測定気体中に含まれる異種の気体濃度を同
時に測定する方法に関するものである。
DETAILED DESCRIPTION OF THE INVENTION <Industrial Application Field> The present invention relates to a method for simultaneously measuring the concentrations of different gases contained in a gas to be measured.

〈従来の技術〉 被測定気体、例えば大気の場合、酸素(0□)を初めと
して、窒素(NZ ) 、その他の含酸素物質、例えば
水分(H,o) 、炭酸ガス(Co□)、亜硫酸ガス(
SOt ) 、−酸化炭素(CO)、窒素酸化物(NO
2、N01N20)、更には希ガス(He、Ar、Ne
等)等種々の気体が含まれている。
<Prior art> In the case of the gas to be measured, such as the atmosphere, oxygen (0□), nitrogen (NZ), and other oxygen-containing substances such as moisture (H, O), carbon dioxide gas (Co□), and sulfurous acid are used. gas(
SOt ), -carbon oxide (CO), nitrogen oxide (NO
2, N01N20), and even rare gases (He, Ar, Ne
etc.) and various other gases are included.

これら含有物質の気体濃度は従来より種々の方法で測定
されているが、近年、測定が簡単で且つ迅速に行え、し
かも検出情報の制御、取扱性が良いこと等から、電子部
品としてのセンサーがよく使用されている。
The gas concentrations of these substances have been measured by various methods, but in recent years, sensors as electronic components have become popular because they can be easily and quickly measured, and the detected information can be easily controlled and handled. Commonly used.

現在、酸素濃度については、固体電解質の酸素イオン導
電板を用いた限界電流方式のセンサー、所謂、酸素セン
サーが使用されている。
Currently, for oxygen concentration, a limiting current type sensor using an oxygen ion conductive plate of a solid electrolyte, a so-called oxygen sensor, is used.

ここで、限界電流方式の酸素センサーとは、酸素イオン
導電性を有する固体電解質に対して、酸素分子(イオン
)供給を制限する(或いは拡散を律速する)手段を設け
たセンサーを総称するものであって、両面に電極が形成
された固体電解質に、外気の間の微小な気体流通口が開
けられた中空カプセルを被冠し、該気体流通口の気体拡
散抵抗によって生ずる限界電流特性を利用するもの、或
いは拡散抵抗を生じる気体流通口の代わりに多孔質物質
(微細な貫通孔を多数有する物質、例えばセラミック)
を上記カプセルの一部に設けたもの、固体電解質の一面
或いは両面、又は該固体電解質全体を包囲するように多
孔質体を形成したもの、固体電解質面の電極上に拡散制
御層を設は更にその上に拡散を阻止する層を形成したも
の、僅かな間隙を持たせた少なくともどちらか一方が両
面に電極が形成された固体電解質の板を並べその間隙に
よる気体の拡散抵抗作用を利用したもの、一端部が閉塞
された筒状の固体電解質の内外面に電極が設けられ、そ
の一方の電極側に前述の如き拡散制御体を設けたタイプ
等、固体電解質の酸素イオン移送現象を制限(律速)す
ることによって濃度を測定する方式のセンサーを総て含
むものとする。
Here, the limiting current type oxygen sensor is a general term for sensors that are equipped with a means to limit the supply of oxygen molecules (ions) (or limit the rate of diffusion) to a solid electrolyte that has oxygen ion conductivity. A solid electrolyte with electrodes formed on both sides is covered with a hollow capsule in which a minute gas communication port is opened between the outside air, and the limiting current characteristic caused by the gas diffusion resistance of the gas communication port is utilized. or porous materials (materials with many fine through-holes, e.g. ceramics) instead of gas flow ports that cause diffusion resistance.
A porous body is formed to surround one or both surfaces of the solid electrolyte, or the entire solid electrolyte, and a diffusion control layer is provided on the electrode on the solid electrolyte surface. A layer on which a layer to prevent diffusion is formed, or a solid electrolyte plate with electrodes formed on both sides of at least one side with a small gap is arranged, and the gap makes use of the gas diffusion resistance effect. , a type in which electrodes are provided on the inner and outer surfaces of a cylindrical solid electrolyte with one end closed, and a diffusion control body as described above is provided on one of the electrodes, which limits the oxygen ion transport phenomenon of the solid electrolyte (rate limiting). ) includes all sensors that measure concentration by

本発明者等も、か−る酸素センサーの開発を継続的に行
っており、現在までに種々のものを提案している。
The present inventors have also continued to develop such oxygen sensors, and have proposed various types to date.

特に、最近、2種以上の異種気体が含まれている被測定
気体において、上記と同種の酸素センサーを用いて印加
電圧を上げていくと、特異な形の電圧−電流特性曲線が
得られることに着目し、研究を進めてきている。
In particular, it has recently been discovered that when the applied voltage is increased using the same type of oxygen sensor as above for a gas to be measured that contains two or more different types of gases, a unique voltage-current characteristic curve can be obtained. We have been conducting research with a focus on

例えば、第7図のように被測定気体中に酸素の他に水分
(H2o)が含まれていると、センサーの電圧−電流特
性曲線1には2段階の平坦領域が発現し、最初の平坦領
域2(第1平坦部)は気体中の酸素に起因して形成され
、次の平坦領域3(第2平坦部)は気体中の酸素と同時
に水分の分解による酸素原子(酸素イオン)の存在に起
因して形成されることが確認され、この第1平坦部の限
界電流値ILt’から酸素濃度を求め、又第2平坦部の
限界電流値IL、’ と第1平坦部の限界電流値IL、
’ との差(ILz’   IL+’)=ΔIL’から
水分濃度を求める方法を既に提案しである(特願昭60
−291569)。
For example, if the measured gas contains moisture (H2o) in addition to oxygen as shown in Figure 7, the voltage-current characteristic curve 1 of the sensor will have two flat regions, and the first flat region will be Region 2 (first flat part) is formed due to oxygen in the gas, and the next flat region 3 (second flat part) is the presence of oxygen atoms (oxygen ions) due to the decomposition of water at the same time as oxygen in the gas. The oxygen concentration was determined from the limiting current value ILt' of the first flat part, and the limiting current value IL,' of the second flat part and the limiting current value of the first flat part IL,
We have already proposed a method for determining the water concentration from the difference between ILz' and ΔIL'(IL+') = ΔIL' (Patent Application No. 1983).
-291569).

又、第8図のように被測定気体中に酸素、窒素及び炭酸
ガス(C:Og)が含まれていると(尚、この場合、水
分による影響を避けるため被測定気体は脱水しである)
、センサーの電圧−電流特性曲線1゛にはやはり2段階
の第1平坦部2゛と第2平坦部3゛が現れると同時にこ
の第2平坦部3°の後には谷部4”が現れ、且つこの谷
部4′の底部4a′が第1平坦部2゛ と略同−レベル
にあることが見出された。この場合も、最初の第1平坦
部2゛は気体中の酸素に起因して形成され、次の第2平
坦部3”は気体中の酸素と同時に炭酸ガスの分解による
酸素原子(酸素イオン)の存在に起因して形成されるこ
とが確認され、この第1平坦部の限界電流値IL、’か
ら酸素濃度を求め、又第2平坦部の限界電流値rt、z
 ”と第1平坦部の限界電流値ILI ”との差(IL
、’−IL。
Also, as shown in Figure 8, if the gas to be measured contains oxygen, nitrogen, and carbon dioxide gas (C:Og) (in this case, the gas to be measured must be dehydrated to avoid the influence of moisture). )
In the voltage-current characteristic curve 1'' of the sensor, two stages of a first flat portion 2'' and a second flat portion 3'' appear, and at the same time, a valley portion 4'' appears after the second flat portion 3°. It was also found that the bottom 4a' of this valley 4' is at approximately the same level as the first flat part 2'.In this case, the first flat part 2' is also caused by oxygen in the gas. It has been confirmed that the next second flat part 3'' is formed due to the presence of oxygen atoms (oxygen ions) due to the decomposition of carbon dioxide gas at the same time as oxygen in the gas, and this first flat part The oxygen concentration is determined from the limiting current value IL,', and the limiting current value rt, z of the second flat part
” and the limiting current value ILI of the first flat portion (IL
,'-IL.

”)=ΔIL”から炭酸ガス濃度を求める方法を既に提
案しである(特願昭60−291571>。
He has already proposed a method for determining the carbon dioxide concentration from ")=ΔIL" (Japanese Patent Application No. 60-291571).

本発明者等が上記第8図における谷部4°の発現に着目
し、種々検討したところ、次の新しい事実を見出した。
The present inventors paid attention to the appearance of the valley 4° in FIG. 8 and conducted various studies, and discovered the following new fact.

つまり、酸素、窒素、炭酸ガスの混合気体に更に水分を
加えた被測定気体の場合、第1平坦部と谷部の底部との
間にレベル差が生じ、この差がそのま\水分濃度を現す
ことを見出した。
In other words, in the case of a gas to be measured that is a mixed gas of oxygen, nitrogen, and carbon dioxide plus moisture, a level difference occurs between the first flat part and the bottom of the valley, and this difference directly increases the water concentration. I discovered that it appears.

更に又、当該被測定気体において、第2平坦部と谷部の
底部とのレベル差から炭酸ガス濃度が得られることを見
出した。
Furthermore, it has been found that the carbon dioxide concentration can be obtained from the level difference between the second flat part and the bottom of the valley in the gas to be measured.

本発明は、この結果に基づきなされたものである。The present invention was made based on this result.

く問題点を解決するための手段及びその作用〉本発明の
一つは、少なくとも水分と炭酸ガスの含有された被測定
気体中の当該水分濃度を測定するにおいて、固体電解質
を用いた限界電流方式の酸素センサーに電圧を印加して
、第1平坦部の限界電流値と第2平坦部後に現れる谷部
の底部の限界電流値とを求め、これらの両限界電流値の
差から被測定気体中の水分濃度を得る気体濃度測定方法
にある。又、本発明のもう一つは、少なくとも水分と炭
酸ガスの含有された被測定気体中の当該炭酸ガス濃度を
測定するにおいて、固体電解質を用いた限界電流方式の
酸素センサーに電圧を印加して、第2平坦部の限界電流
値と第2平坦部後に現れる谷部の底部の限界電流値とを
求め、これらの両限界電流値の差から被測定気体中の炭
酸ガス濃度を得る気体濃度測定方法にある。
One aspect of the present invention is a limiting current method using a solid electrolyte in measuring the water concentration in a gas to be measured containing at least water and carbon dioxide. A voltage is applied to the oxygen sensor to determine the limiting current value at the first flat part and the limiting current value at the bottom of the valley that appears after the second flat part, and from the difference between these two limiting current values, the There is a gas concentration measurement method that obtains the moisture concentration. Another aspect of the present invention is to apply a voltage to a limiting current type oxygen sensor using a solid electrolyte in measuring the carbon dioxide concentration in a gas to be measured containing at least water and carbon dioxide. , the limiting current value of the second flat part and the limiting current value of the bottom of the valley that appears after the second flat part are determined, and the carbon dioxide concentration in the gas to be measured is obtained from the difference between these two limiting current values. Gas concentration measurement. It's in the method.

以下、か\る本発明方法を図面により更に詳しく説明す
る。
Hereinafter, the method of the present invention will be explained in more detail with reference to the drawings.

第1図は固体電解質を用いた限界電流方式の酸素センサ
ーによる電圧−電流特性曲線を示したものである。尚、
ここで用いたセンサーは両面に電極が形成された固体電
解質に、外気の間の微小な気体流通口が開けられた中空
カプセルを被冠し、該気体流通口の気体拡散抵抗によっ
て生ずる限界電流特性を利用した構造のものである。
FIG. 1 shows a voltage-current characteristic curve of a limiting current type oxygen sensor using a solid electrolyte. still,
The sensor used here consists of a solid electrolyte with electrodes formed on both sides, covered with a hollow capsule in which a minute gas flow port is opened between the outside air, and the limiting current characteristic caused by the gas diffusion resistance of the gas flow port. It has a structure that utilizes.

この第1図において、電圧−電流特性曲線1)は混合ガ
ス(Oz 、Nz 、Cot 、Hz Oを主成分とす
る混合ガスであり、実質的に大気にある程度のCo、 
、HE Oを含ませたものである)の場合で、センサー
の印加電圧を上昇させていくと、先ず、酸素の存在によ
る第1平坦部12が現れ、次に炭酸ガス及び水分の存在
に起因する第2平坦部13が現れ、この後一旦下降して
谷部14を作った後、又上昇する。この谷部14の底部
14aのレベルは前述のように第1平坦部12より高い
In Fig. 1, the voltage-current characteristic curve 1) is a mixed gas (Oz, Nz, Cot, Hz).
, containing HE O), as the applied voltage to the sensor is increased, first a first flat part 12 appears due to the presence of oxygen, and then a flat part due to the presence of carbon dioxide and moisture appears. A second flat portion 13 appears, and after that it once descends to form a valley portion 14, and then rises again. The level of the bottom portion 14a of this valley portion 14 is higher than the first flat portion 12, as described above.

ここで、前記第8図の被測定気体(02、N2、COt
の混合ガス)に比較して、本混合ガス(0□、Nz 、
Cot 、Hz O)の場合、HE Oの存在骨だけ、
相対的に酸素分圧が小さくなるため、第1平坦部12の
レベルが低くなり、又第2平坦部13のレベルにあって
は、CO2と820の両成分の存在により高(なる。つ
まり、第2平坦部13が現れるのは、Co2とHE 0
が分解し酸素を生成することによるものと、推論される
Here, the gas to be measured (02, N2, COt
This mixed gas (0□, Nz,
Cot, Hz O), only the bone where HE O is present,
Since the oxygen partial pressure becomes relatively small, the level in the first flat part 12 becomes low, and the level in the second flat part 13 becomes high due to the presence of both CO2 and 820 components. The second flat part 13 appears because of Co2 and HE 0
It is inferred that this is due to the decomposition of oxygen and the production of oxygen.

又、第2平坦部13後の谷部14のレベルは水分の分解
による酸素骨の存在により第1平坦部12より高くなる
ものと、推論される。
Further, it is inferred that the level of the valley portion 14 after the second flat portion 13 is higher than that of the first flat portion 12 due to the presence of oxygenated bone due to the decomposition of water.

従って、低い電圧V1を印加すれば酸素による第1平坦
部12の限界電流値IL、が得られ、高い電圧v2を印
加すれば第2平坦部13の炭酸ガスと水分の存在による
限界電流値IL、が得られ、更に高い電圧V、を印加す
れば谷部14の底部14aの限界電流値IL3が得られ
る。
Therefore, if a low voltage V1 is applied, the limiting current value IL of the first flat part 12 due to oxygen is obtained, and if a high voltage v2 is applied, the limiting current value IL of the second flat part 13 due to the presence of carbon dioxide and moisture is obtained. , is obtained, and if a higher voltage V is applied, the limit current value IL3 at the bottom 14a of the valley 14 is obtained.

以上の限界電流値IL+ と限界電流値IL、との差(
IL3−IL、)から差電流値ΔIL”が求められ、又
限界電流値IL、と限界電流値IL、との差(ILz 
 IL、)から差電流値ΔIL1が求められる。
The difference between the above limit current value IL+ and limit current value IL (
The difference current value ΔIL" is obtained from IL3-IL, ), and the difference between the limit current value IL and the limit current value IL (ILz
The difference current value ΔIL1 is determined from IL, ).

本発明者等が、差電流値ΔIL”と混合ガス中の水分濃
度との相関関係を求めたところ、第2図に示したように
両者の間には比例関係があることが分かった。又差電流
値ΔIL”と混合ガス中の炭酸ガス濃度との相関関係を
求めたところ、第3図に示したように両者の間には比例
関係があることが分かった。
When the present inventors determined the correlation between the difference current value ΔIL'' and the water concentration in the mixed gas, it was found that there is a proportional relationship between the two, as shown in FIG. When the correlation between the difference current value ΔIL'' and the carbon dioxide concentration in the mixed gas was determined, it was found that there was a proportional relationship between the two as shown in FIG.

このことから、予め差電流値ΔIL”に対応する水分濃
度を求めておけば、当該差電流値ΔIL“から直ちに水
分濃度を求めることができる。又、同様にして、予め差
電流値ΔIL−に対応する炭酸ガス濃度を求めておけば
、当該差電流値ΔIL1から直ちに炭酸ガス濃度を求め
ることができる。
From this, if the water concentration corresponding to the difference current value ΔIL" is found in advance, the water concentration can be immediately found from the difference current value ΔIL". Similarly, if the carbon dioxide concentration corresponding to the difference current value ΔIL- is determined in advance, the carbon dioxide concentration can be immediately determined from the difference current value ΔIL1.

又、酸素濃度は、第4図に示す如く酸素の限界電流値I
L、に比例することが既に知られているため、やはり当
該限界電流値IL+から直ちに求めることができる。
In addition, the oxygen concentration is determined by the oxygen limiting current value I as shown in Figure 4.
Since it is already known that it is proportional to L, it can be immediately determined from the limit current value IL+.

〈実施例〉 拡散孔を有するカプセル型の酸素センサーを用いて、測
定温度25℃で、種々の水分濃度(予め既知の水分を入
れて設定した設定濃度、尚、他の02、N2、CO□の
濃度は一定)の混合気体ついて、実測したところ、第1
表の如くであった。
<Example> Using a capsule-type oxygen sensor with a diffusion hole, various moisture concentrations (set concentration set by adding known moisture in advance, and other 02, N2, CO□) were measured at a measurement temperature of 25°C. When we actually measured a mixed gas with a constant concentration of
It was as shown in the table.

第  1  表 この第1表により求められた値をプロットし、グラフ化
すると第5図の如くであった。
Table 1 The values determined from Table 1 were plotted and graphed as shown in Figure 5.

このグラフから、ΔIL”と実測値とがよく対応してい
ることが分かる。
From this graph, it can be seen that ΔIL'' and the actual measured values correspond well.

又、拡散孔を有するカプセル型の酸素センサーを用いて
、測定温度25℃で、種々の炭酸ガス濃度(予め既知の
炭酸ガスを入れて設定した設定濃度、尚、他(7)02
 、NZ 、H,Oの濃度は一定)の混合気体ついて、
実測したところ、第2表の如くであった。
In addition, using a capsule-type oxygen sensor with a diffusion hole, various carbon dioxide concentrations (set concentrations set by adding known carbon dioxide gas in advance, etc.) were measured at a measurement temperature of 25°C.
, NZ , H, O concentration is constant),
The actual measurements were as shown in Table 2.

第2表 この第2表により求められた値をプロットし、グラフ化
すると第6図の如くであった。
Table 2 The values determined from Table 2 were plotted and graphed as shown in Figure 6.

このグラフから、ΔIL−と実測値とがよく対応してい
ることが分かる。
It can be seen from this graph that ΔIL- and the actual measured values correspond well.

尚、本発明を実施するに当たっては、特願昭60−20
2169号に示される如く複数野内部電極に異なる電圧
を印加してもよいし、或いは又2個のセンサーを並列に
して用いてもよいし、更には印加電圧を掃引することに
よって、2段階の平坦領域を実現して測定してもよい。
In carrying out the present invention, patent application 1986-20
As shown in No. 2169, different voltages may be applied to the internal electrodes of multiple fields, or two sensors may be used in parallel, and furthermore, by sweeping the applied voltage, two-step A flat area may be realized and measured.

〈発明の効果〉 以上の説明から明らかなように本発明によれば、被測定
気体中の少なくとも水分濃度、炭酸ガス濃度及び必要に
より酸素濃度を簡単且つ迅速に測定することができる。
<Effects of the Invention> As is clear from the above description, according to the present invention, at least the moisture concentration, carbon dioxide concentration, and, if necessary, oxygen concentration in the gas to be measured can be easily and quickly measured.

特に、炭酸ガス濃度の場合、パーセントオーダーの比較
的高濃度ものを高精度で測定することができる。
In particular, in the case of carbon dioxide concentration, relatively high concentrations on the order of percent can be measured with high precision.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は本発明方法を説明するための限界電流方式の酸
素センサーにおける各電圧−電流特性曲線を示したグラ
フ、第2図は限界電流値間の差電流値ΔIL”と水分濃
度との関係を示したグラフ、第3図は限界電流値間の差
電流値ΔIL−と炭酸ガス濃度との関係を示したグラフ
、第4図は限界電流値と酸素濃度との関係を示したグラ
フ、第5図は限界電流値間の差電流値ΔIL”と実測値
を示したグラフ、第6図は限界電流値間の差電流値ΔI
L−と実測値を示したグラフ、第7図及び第8図は限界
電流方式の酸素センサーにおける他の各電圧−電流特性
曲線を示したグラフである。 図中、 1)・・・水分及び炭酸ガス含有気体の電圧−電流特性
曲線、 12・・・第1平坦部、 13・・・第2平坦部、 14・・・谷部、 14a・・・底部、 特許出願人     藤倉電線株式会社第1図 V+    V2  V3 E9力0電田 第5図 メくろテ遺戸j(oム) 第2図 第4図 轍!=5Lth(01・) 第3図 挨j鷲力・ス濃支(’/。) −一二 第7図 E口 カ0 電 aミ 第8図 Ep力O電氏
Fig. 1 is a graph showing each voltage-current characteristic curve in a limiting current type oxygen sensor to explain the method of the present invention, and Fig. 2 is a graph showing the relationship between the difference current value ΔIL'' between the limiting current values and the water concentration. 3 is a graph showing the relationship between the difference current value ΔIL- between the limiting current values and the carbon dioxide concentration. FIG. 4 is a graph showing the relationship between the limiting current value and the oxygen concentration. Figure 5 is a graph showing the difference current value ΔIL between the limiting current values and the actual measured value, and Figure 6 is the graph showing the difference current value ΔI between the limiting current values.
Graphs showing L- and actual measured values, and FIGS. 7 and 8 are graphs showing other voltage-current characteristic curves in the limiting current type oxygen sensor. In the figure, 1)... Voltage-current characteristic curve of gas containing moisture and carbon dioxide, 12... First flat part, 13... Second flat part, 14... Valley part, 14a... Bottom, Patent applicant: Fujikura Electric Cable Co., Ltd. Figure 1 V+ V2 V3 E9 Power 0 Denta Figure 5 Mekurote Ito j (om) Figure 2 Figure 4 Rut! =5Lth (01・) Figure 3 Greeting j Washiki・Sunoshi ('/.) -12 Figure 7 E mouth Ka0 Den ami Figure 8 Ep Power O Den Mr.

Claims (2)

【特許請求の範囲】[Claims] (1)少なくとも水分と炭酸ガスの含有された被測定気
体中の当該水分濃度を測定するにおいて、固体電解質を
用いた限界電流方式の酸素センサーに電圧を印加して、
第1平坦部の限界電流値と第2平坦部後に現れる谷部の
底部の限界電流値とを求め、これらの両限界電流値の差
から被測定気体中の水分濃度を得ることを特徴とする気
体濃度測定方法。
(1) In measuring the moisture concentration in a gas to be measured containing at least moisture and carbon dioxide, a voltage is applied to a limiting current type oxygen sensor using a solid electrolyte,
The method is characterized in that the limiting current value at the first flat portion and the limiting current value at the bottom of the valley appearing after the second flat portion are determined, and the water concentration in the gas to be measured is obtained from the difference between these two limiting current values. Gas concentration measurement method.
(2)少なくとも水分と炭酸ガスの含有された被測定気
体中の当該炭酸ガス濃度を測定するにおいて、固体電解
質を用いた限界電流方式の酸素センサーに電圧を印加し
て、第2平坦部の限界電流値と第2平坦部後に現れる谷
部の底部の限界電流値とを求め、これらの両限界電流値
の差から被測定気体中の炭酸ガス濃度を得ることを特徴
とする気体濃度測定方法。
(2) In measuring the carbon dioxide concentration in a gas to be measured containing at least water and carbon dioxide, a voltage is applied to a limiting current type oxygen sensor using a solid electrolyte, and the limit of the second flat part is measured. A gas concentration measuring method characterized in that a current value and a limiting current value at the bottom of a valley appearing after the second flat portion are determined, and the carbon dioxide concentration in the gas to be measured is obtained from the difference between these two limiting current values.
JP61019084A 1986-01-30 1986-01-30 Method of measuring gas concentration Pending JPS62175657A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61019084A JPS62175657A (en) 1986-01-30 1986-01-30 Method of measuring gas concentration

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61019084A JPS62175657A (en) 1986-01-30 1986-01-30 Method of measuring gas concentration

Publications (1)

Publication Number Publication Date
JPS62175657A true JPS62175657A (en) 1987-08-01

Family

ID=11989581

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61019084A Pending JPS62175657A (en) 1986-01-30 1986-01-30 Method of measuring gas concentration

Country Status (1)

Country Link
JP (1) JPS62175657A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013250164A (en) * 2012-05-31 2013-12-12 Ngk Spark Plug Co Ltd Gas sensor control device
JP2013250166A (en) * 2012-05-31 2013-12-12 Ngk Spark Plug Co Ltd Gas sensor control device
CN106471238A (en) * 2014-06-11 2017-03-01 罗伯特·博世有限公司 Method for analyzing and processing characteristic deviation

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013250164A (en) * 2012-05-31 2013-12-12 Ngk Spark Plug Co Ltd Gas sensor control device
JP2013250166A (en) * 2012-05-31 2013-12-12 Ngk Spark Plug Co Ltd Gas sensor control device
CN106471238A (en) * 2014-06-11 2017-03-01 罗伯特·博世有限公司 Method for analyzing and processing characteristic deviation
CN106471238B (en) * 2014-06-11 2020-09-22 罗伯特·博世有限公司 Method for evaluating deviations of a processing characteristic

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