JPS62175555U - - Google Patents
Info
- Publication number
- JPS62175555U JPS62175555U JP6273786U JP6273786U JPS62175555U JP S62175555 U JPS62175555 U JP S62175555U JP 6273786 U JP6273786 U JP 6273786U JP 6273786 U JP6273786 U JP 6273786U JP S62175555 U JPS62175555 U JP S62175555U
- Authority
- JP
- Japan
- Prior art keywords
- crucible
- ion source
- divided
- divided part
- heating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010438 heat treatment Methods 0.000 claims description 4
- 238000013459 approach Methods 0.000 claims 1
- 239000000919 ceramic Substances 0.000 claims 1
Landscapes
- Physical Vapour Deposition (AREA)
- Crucibles And Fluidized-Bed Furnaces (AREA)
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6273786U JPS62175555U (enExample) | 1986-04-24 | 1986-04-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6273786U JPS62175555U (enExample) | 1986-04-24 | 1986-04-24 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62175555U true JPS62175555U (enExample) | 1987-11-07 |
Family
ID=30897294
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6273786U Pending JPS62175555U (enExample) | 1986-04-24 | 1986-04-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62175555U (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0224942A (ja) * | 1988-07-14 | 1990-01-26 | Teru Barian Kk | イオン注入装置 |
-
1986
- 1986-04-24 JP JP6273786U patent/JPS62175555U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0224942A (ja) * | 1988-07-14 | 1990-01-26 | Teru Barian Kk | イオン注入装置 |