JPS62175555U - - Google Patents

Info

Publication number
JPS62175555U
JPS62175555U JP6273786U JP6273786U JPS62175555U JP S62175555 U JPS62175555 U JP S62175555U JP 6273786 U JP6273786 U JP 6273786U JP 6273786 U JP6273786 U JP 6273786U JP S62175555 U JPS62175555 U JP S62175555U
Authority
JP
Japan
Prior art keywords
crucible
ion source
divided
divided part
heating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6273786U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6273786U priority Critical patent/JPS62175555U/ja
Publication of JPS62175555U publication Critical patent/JPS62175555U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)
  • Physical Vapour Deposition (AREA)
  • Crucibles And Fluidized-Bed Furnaces (AREA)
JP6273786U 1986-04-24 1986-04-24 Pending JPS62175555U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6273786U JPS62175555U (enrdf_load_stackoverflow) 1986-04-24 1986-04-24

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6273786U JPS62175555U (enrdf_load_stackoverflow) 1986-04-24 1986-04-24

Publications (1)

Publication Number Publication Date
JPS62175555U true JPS62175555U (enrdf_load_stackoverflow) 1987-11-07

Family

ID=30897294

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6273786U Pending JPS62175555U (enrdf_load_stackoverflow) 1986-04-24 1986-04-24

Country Status (1)

Country Link
JP (1) JPS62175555U (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0224942A (ja) * 1988-07-14 1990-01-26 Teru Barian Kk イオン注入装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0224942A (ja) * 1988-07-14 1990-01-26 Teru Barian Kk イオン注入装置

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