JPS62174606U - - Google Patents

Info

Publication number
JPS62174606U
JPS62174606U JP6155686U JP6155686U JPS62174606U JP S62174606 U JPS62174606 U JP S62174606U JP 6155686 U JP6155686 U JP 6155686U JP 6155686 U JP6155686 U JP 6155686U JP S62174606 U JPS62174606 U JP S62174606U
Authority
JP
Japan
Prior art keywords
vacuum chamber
vacuum
liquid
way solenoid
solenoid valve
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6155686U
Other languages
English (en)
Japanese (ja)
Other versions
JPS643451Y2 (is
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6155686U priority Critical patent/JPS643451Y2/ja
Publication of JPS62174606U publication Critical patent/JPS62174606U/ja
Application granted granted Critical
Publication of JPS643451Y2 publication Critical patent/JPS643451Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Degasification And Air Bubble Elimination (AREA)
JP6155686U 1986-04-22 1986-04-22 Expired JPS643451Y2 (is)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6155686U JPS643451Y2 (is) 1986-04-22 1986-04-22

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6155686U JPS643451Y2 (is) 1986-04-22 1986-04-22

Publications (2)

Publication Number Publication Date
JPS62174606U true JPS62174606U (is) 1987-11-06
JPS643451Y2 JPS643451Y2 (is) 1989-01-30

Family

ID=30895002

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6155686U Expired JPS643451Y2 (is) 1986-04-22 1986-04-22

Country Status (1)

Country Link
JP (1) JPS643451Y2 (is)

Also Published As

Publication number Publication date
JPS643451Y2 (is) 1989-01-30

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