JPS62174606U - - Google Patents
Info
- Publication number
- JPS62174606U JPS62174606U JP6155686U JP6155686U JPS62174606U JP S62174606 U JPS62174606 U JP S62174606U JP 6155686 U JP6155686 U JP 6155686U JP 6155686 U JP6155686 U JP 6155686U JP S62174606 U JPS62174606 U JP S62174606U
- Authority
- JP
- Japan
- Prior art keywords
- vacuum chamber
- vacuum
- liquid
- way solenoid
- solenoid valve
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000007872 degassing Methods 0.000 claims 2
- 239000007788 liquid Substances 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Degasification And Air Bubble Elimination (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6155686U JPS643451Y2 (is) | 1986-04-22 | 1986-04-22 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6155686U JPS643451Y2 (is) | 1986-04-22 | 1986-04-22 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS62174606U true JPS62174606U (is) | 1987-11-06 |
JPS643451Y2 JPS643451Y2 (is) | 1989-01-30 |
Family
ID=30895002
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP6155686U Expired JPS643451Y2 (is) | 1986-04-22 | 1986-04-22 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS643451Y2 (is) |
-
1986
- 1986-04-22 JP JP6155686U patent/JPS643451Y2/ja not_active Expired
Also Published As
Publication number | Publication date |
---|---|
JPS643451Y2 (is) | 1989-01-30 |