JPS621735U - - Google Patents
Info
- Publication number
- JPS621735U JPS621735U JP9044985U JP9044985U JPS621735U JP S621735 U JPS621735 U JP S621735U JP 9044985 U JP9044985 U JP 9044985U JP 9044985 U JP9044985 U JP 9044985U JP S621735 U JPS621735 U JP S621735U
- Authority
- JP
- Japan
- Prior art keywords
- gas supply
- valve
- mass flow
- flow controller
- bypass line
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000002994 raw material Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9044985U JPS621735U (me) | 1985-06-15 | 1985-06-15 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9044985U JPS621735U (me) | 1985-06-15 | 1985-06-15 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS621735U true JPS621735U (me) | 1987-01-08 |
Family
ID=30645450
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9044985U Pending JPS621735U (me) | 1985-06-15 | 1985-06-15 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS621735U (me) |
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1985
- 1985-06-15 JP JP9044985U patent/JPS621735U/ja active Pending