JPS6217331U - - Google Patents

Info

Publication number
JPS6217331U
JPS6217331U JP10820485U JP10820485U JPS6217331U JP S6217331 U JPS6217331 U JP S6217331U JP 10820485 U JP10820485 U JP 10820485U JP 10820485 U JP10820485 U JP 10820485U JP S6217331 U JPS6217331 U JP S6217331U
Authority
JP
Japan
Prior art keywords
bottom plate
storage device
machine storage
vacuum vessel
rotary machine
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10820485U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10820485U priority Critical patent/JPS6217331U/ja
Publication of JPS6217331U publication Critical patent/JPS6217331U/ja
Pending legal-status Critical Current

Links

JP10820485U 1985-07-17 1985-07-17 Pending JPS6217331U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10820485U JPS6217331U (enrdf_load_stackoverflow) 1985-07-17 1985-07-17

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10820485U JPS6217331U (enrdf_load_stackoverflow) 1985-07-17 1985-07-17

Publications (1)

Publication Number Publication Date
JPS6217331U true JPS6217331U (enrdf_load_stackoverflow) 1987-02-02

Family

ID=30985181

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10820485U Pending JPS6217331U (enrdf_load_stackoverflow) 1985-07-17 1985-07-17

Country Status (1)

Country Link
JP (1) JPS6217331U (enrdf_load_stackoverflow)

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