JPS62173028U - - Google Patents

Info

Publication number

JPS62173028U

JPS62173028U JP6194086U JP6194086U JPS62173028U JP S62173028 U JPS62173028 U JP S62173028U JP 6194086 U JP6194086 U JP 6194086U JP 6194086 U JP6194086 U JP 6194086U JP S62173028 U JPS62173028 U JP S62173028U

Authority

JP

Japan

Prior art keywords

pressure sensor

temperature range

wide temperature

pressure

range according

Prior art date

1986-04-22

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 239000004065 semiconductor Substances 0.000 claims description 4
• 239000002184 metal Substances 0.000 claims description 3
• 229910052751 metal Inorganic materials 0.000 claims description 3
• 239000000126 substance Substances 0.000 claims 2
• 239000000463 material Substances 0.000 claims 1
• 238000010586 diagram Methods 0.000 description 2
• RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
• 229910052802 copper Inorganic materials 0.000 description 1
• 239000010949 copper Substances 0.000 description 1