JPS62172147U - - Google Patents

Info

Publication number
JPS62172147U
JPS62172147U JP6000086U JP6000086U JPS62172147U JP S62172147 U JPS62172147 U JP S62172147U JP 6000086 U JP6000086 U JP 6000086U JP 6000086 U JP6000086 U JP 6000086U JP S62172147 U JPS62172147 U JP S62172147U
Authority
JP
Japan
Prior art keywords
deposited film
chamber
vibrating
producing
utility
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6000086U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6000086U priority Critical patent/JPS62172147U/ja
Publication of JPS62172147U publication Critical patent/JPS62172147U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
JP6000086U 1986-04-21 1986-04-21 Pending JPS62172147U (US20100223739A1-20100909-C00025.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6000086U JPS62172147U (US20100223739A1-20100909-C00025.png) 1986-04-21 1986-04-21

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6000086U JPS62172147U (US20100223739A1-20100909-C00025.png) 1986-04-21 1986-04-21

Publications (1)

Publication Number Publication Date
JPS62172147U true JPS62172147U (US20100223739A1-20100909-C00025.png) 1987-10-31

Family

ID=30892021

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6000086U Pending JPS62172147U (US20100223739A1-20100909-C00025.png) 1986-04-21 1986-04-21

Country Status (1)

Country Link
JP (1) JPS62172147U (US20100223739A1-20100909-C00025.png)

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