JPS62172035U - - Google Patents
Info
- Publication number
- JPS62172035U JPS62172035U JP4916686U JP4916686U JPS62172035U JP S62172035 U JPS62172035 U JP S62172035U JP 4916686 U JP4916686 U JP 4916686U JP 4916686 U JP4916686 U JP 4916686U JP S62172035 U JPS62172035 U JP S62172035U
- Authority
- JP
- Japan
- Prior art keywords
- spraying
- nozzle
- application
- supplying
- organic chemical
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000126 substance Substances 0.000 claims description 3
- 238000005507 spraying Methods 0.000 claims 3
- 238000004140 cleaning Methods 0.000 claims 2
- 239000007788 liquid Substances 0.000 claims 1
- 239000003960 organic solvent Substances 0.000 description 3
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
Landscapes
- Laminated Bodies (AREA)
- Weting (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4916686U JPS62172035U (fi) | 1986-04-02 | 1986-04-02 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4916686U JPS62172035U (fi) | 1986-04-02 | 1986-04-02 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62172035U true JPS62172035U (fi) | 1987-10-31 |
Family
ID=30871364
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4916686U Pending JPS62172035U (fi) | 1986-04-02 | 1986-04-02 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62172035U (fi) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005311098A (ja) * | 2004-04-22 | 2005-11-04 | Toppan Printing Co Ltd | レジスト吐出装置及びそれを用いたレジスト塗布装置及びレジスト塗布方法 |
-
1986
- 1986-04-02 JP JP4916686U patent/JPS62172035U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005311098A (ja) * | 2004-04-22 | 2005-11-04 | Toppan Printing Co Ltd | レジスト吐出装置及びそれを用いたレジスト塗布装置及びレジスト塗布方法 |