JPS6217130U - - Google Patents
Info
- Publication number
- JPS6217130U JPS6217130U JP10851785U JP10851785U JPS6217130U JP S6217130 U JPS6217130 U JP S6217130U JP 10851785 U JP10851785 U JP 10851785U JP 10851785 U JP10851785 U JP 10851785U JP S6217130 U JPS6217130 U JP S6217130U
- Authority
- JP
- Japan
- Prior art keywords
- electrodes
- substrate
- resistance
- contact piece
- contact
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000009792 diffusion process Methods 0.000 claims description 3
- 239000000758 substrate Substances 0.000 claims 2
- 239000010409 thin film Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 239000000523 sample Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
Landscapes
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
- Measuring Leads Or Probes (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985108517U JPH0528769Y2 (US06815460-20041109-C00097.png) | 1985-07-16 | 1985-07-16 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985108517U JPH0528769Y2 (US06815460-20041109-C00097.png) | 1985-07-16 | 1985-07-16 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6217130U true JPS6217130U (US06815460-20041109-C00097.png) | 1987-02-02 |
| JPH0528769Y2 JPH0528769Y2 (US06815460-20041109-C00097.png) | 1993-07-23 |
Family
ID=30985788
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1985108517U Expired - Lifetime JPH0528769Y2 (US06815460-20041109-C00097.png) | 1985-07-16 | 1985-07-16 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0528769Y2 (US06815460-20041109-C00097.png) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009053207A (ja) * | 2008-11-04 | 2009-03-12 | Shinko Electric Ind Co Ltd | 電気特性測定用プローブ及びその製造方法 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5560869A (en) * | 1978-10-31 | 1980-05-08 | Mitsubishi Electric Corp | Device for measuring spreading resistance |
-
1985
- 1985-07-16 JP JP1985108517U patent/JPH0528769Y2/ja not_active Expired - Lifetime
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5560869A (en) * | 1978-10-31 | 1980-05-08 | Mitsubishi Electric Corp | Device for measuring spreading resistance |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009053207A (ja) * | 2008-11-04 | 2009-03-12 | Shinko Electric Ind Co Ltd | 電気特性測定用プローブ及びその製造方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0528769Y2 (US06815460-20041109-C00097.png) | 1993-07-23 |
