JPS62171299U - - Google Patents

Info

Publication number

JPS62171299U

JPS62171299U JP5945686U JP5945686U JPS62171299U JP S62171299 U JPS62171299 U JP S62171299U JP 5945686 U JP5945686 U JP 5945686U JP 5945686 U JP5945686 U JP 5945686U JP S62171299 U JPS62171299 U JP S62171299U

Authority

JP

Japan

Prior art keywords

resonator

bimorph

funnel

additional resonator

additional

Prior art date

1986-04-18

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 238000005452 bending Methods 0.000 claims 2
• 238000010586 diagram Methods 0.000 description 5
• 238000000926 separation method Methods 0.000 description 5
• 239000002131 composite material Substances 0.000 description 2
• 230000035945 sensitivity Effects 0.000 description 1