JPS6217125U - - Google Patents
Info
- Publication number
- JPS6217125U JPS6217125U JP10821085U JP10821085U JPS6217125U JP S6217125 U JPS6217125 U JP S6217125U JP 10821085 U JP10821085 U JP 10821085U JP 10821085 U JP10821085 U JP 10821085U JP S6217125 U JPS6217125 U JP S6217125U
- Authority
- JP
- Japan
- Prior art keywords
- burner
- gas introduction
- introduction part
- combustion
- furnace
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000007789 gas Substances 0.000 claims description 6
- 238000002485 combustion reaction Methods 0.000 claims description 5
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims description 3
- 239000001257 hydrogen Substances 0.000 claims description 3
- 229910052739 hydrogen Inorganic materials 0.000 claims description 3
- 239000004065 semiconductor Substances 0.000 claims 1
Landscapes
- Muffle Furnaces And Rotary Kilns (AREA)
Description
第１図はこの考案の一実施例の装置の要部を示
す斜視図、第２図ａ，ｂは第１図の一部のガス導
入部支持機構を一部断面で示す側面図、第３図は
従来の装置の要部を示す斜視図である。
１１…ガス導入部支持機構、１２…立上り部材
、１３…Ｔ型部材、１４ ガス導入部締結部、１
０１…炉芯管、１０２…炉台、１０３…水素燃焼
バーナ、１０３ｂ…バーナのガス導入部。
FIG. 1 is a perspective view showing the main parts of an apparatus according to an embodiment of this invention, FIGS. The figure is a perspective view showing the main parts of a conventional device. DESCRIPTION OF SYMBOLS 11 ... Gas introduction part support mechanism, 12... Standing member, 13... T-shaped member, 14 Gas introduction part fastening part, 1
01... Furnace core tube, 102... Furnace stand, 103 ... Hydrogen combustion burner, 103b... Gas introduction part of burner.
Claims (1)
連接された水素燃焼バーナの燃焼部と、前記水素
燃焼バーナの燃焼部に接手を介して接続された前
記バーナのガス導入部と、前記バーナのガス導入
部を炉台に対し高さおよび水平方向の各々を調節
自在に締結し支持するガス導入部支持機構を具備
することを特徴とする半導体装置の反応炉装置。 a combustion part of a hydrogen combustion burner coaxially connected to one end of a furnace core tube fixed to a furnace stand; a gas introduction part of the burner connected to the combustion part of the hydrogen combustion burner via a joint; 1. A reactor apparatus for a semiconductor device, comprising a gas introduction part support mechanism for fastening and supporting a gas introduction part of a burner to a furnace stand so as to be adjustable in both height and horizontal directions.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10821085U JPS6217125U (en) | 1985-07-17 | 1985-07-17 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10821085U JPS6217125U (en) | 1985-07-17 | 1985-07-17 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6217125U true JPS6217125U (en) | 1987-02-02 |
Family
ID=30985193
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10821085U Pending JPS6217125U (en) | 1985-07-17 | 1985-07-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6217125U (en) |
-
1985
- 1985-07-17 JP JP10821085U patent/JPS6217125U/ja active Pending