JPS62170826U - - Google Patents
Info
- Publication number
- JPS62170826U JPS62170826U JP6004286U JP6004286U JPS62170826U JP S62170826 U JPS62170826 U JP S62170826U JP 6004286 U JP6004286 U JP 6004286U JP 6004286 U JP6004286 U JP 6004286U JP S62170826 U JPS62170826 U JP S62170826U
- Authority
- JP
- Japan
- Prior art keywords
- rotating body
- support device
- vacuum
- omnidirectional sliding
- omnidirectional
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005096 rolling process Methods 0.000 claims 1
- 229910000831 Steel Inorganic materials 0.000 description 2
- 239000010959 steel Substances 0.000 description 2
- 238000007738 vacuum evaporation Methods 0.000 description 1
Landscapes
- Bearings For Parts Moving Linearly (AREA)
Description
第１図は本考案の実施例を示す要部断面図、第
２図は全方向摺動部材の例を示す断面図、第３図
は真空蒸着装置における従来の回転体支持装置の
例を示す断面図である。
１……支持枠体、２……全方向摺動部材、３…
…回転体、８……大径鋼球、９……小径鋼球。
Fig. 1 is a sectional view of a main part showing an embodiment of the present invention, Fig. 2 is a sectional view showing an example of an omnidirectional sliding member, and Fig. 3 is an example of a conventional rotating body support device in a vacuum evaporation apparatus. FIG. 1... Support frame body, 2... Omnidirectional sliding member, 3...
...Rotating body, 8...Large diameter steel ball, 9...Small diameter steel ball.
Claims (1)
装置において、大径球と多数個の小径球とを組み
合わせてなる全方向摺動部材を少なくとも３個具
備してなり、前記回転体の下面に前記全方向摺動
部材を摺接して回転体を支持するように構成した
真空装置における回転体支持装置。 A rotating body support device for supporting a rotating body rolling in a vacuum, comprising at least three omnidirectional sliding members each made of a combination of a large diameter ball and a large number of small diameter balls, the lower surface of the rotating body being A rotating body support device in a vacuum apparatus configured to support a rotating body by slidingly contacting the omnidirectional sliding member to the rotating body.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6004286U JPS62170826U (en) | 1986-04-21 | 1986-04-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6004286U JPS62170826U (en) | 1986-04-21 | 1986-04-21 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62170826U true JPS62170826U (en) | 1987-10-29 |
Family
ID=30892102
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6004286U Pending JPS62170826U (en) | 1986-04-21 | 1986-04-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62170826U (en) |
-
1986
- 1986-04-21 JP JP6004286U patent/JPS62170826U/ja active Pending