JPS62170762U - - Google Patents

Info

Publication number
JPS62170762U
JPS62170762U JP5685286U JP5685286U JPS62170762U JP S62170762 U JPS62170762 U JP S62170762U JP 5685286 U JP5685286 U JP 5685286U JP 5685286 U JP5685286 U JP 5685286U JP S62170762 U JPS62170762 U JP S62170762U
Authority
JP
Japan
Prior art keywords
electrode plate
plasma etching
glassy carbon
parallel plate
utility
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5685286U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6336047Y2 (US06368395-20020409-C00050.png
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5685286U priority Critical patent/JPS6336047Y2/ja
Publication of JPS62170762U publication Critical patent/JPS62170762U/ja
Application granted granted Critical
Publication of JPS6336047Y2 publication Critical patent/JPS6336047Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • ing And Chemical Polishing (AREA)
  • Drying Of Semiconductors (AREA)
JP5685286U 1986-04-17 1986-04-17 Expired JPS6336047Y2 (US06368395-20020409-C00050.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5685286U JPS6336047Y2 (US06368395-20020409-C00050.png) 1986-04-17 1986-04-17

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5685286U JPS6336047Y2 (US06368395-20020409-C00050.png) 1986-04-17 1986-04-17

Publications (2)

Publication Number Publication Date
JPS62170762U true JPS62170762U (US06368395-20020409-C00050.png) 1987-10-29
JPS6336047Y2 JPS6336047Y2 (US06368395-20020409-C00050.png) 1988-09-26

Family

ID=30886035

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5685286U Expired JPS6336047Y2 (US06368395-20020409-C00050.png) 1986-04-17 1986-04-17

Country Status (1)

Country Link
JP (1) JPS6336047Y2 (US06368395-20020409-C00050.png)

Also Published As

Publication number Publication date
JPS6336047Y2 (US06368395-20020409-C00050.png) 1988-09-26

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