JPS62170650U - - Google Patents

Info

Publication number

JPS62170650U

JPS62170650U JP5881386U JP5881386U JPS62170650U JP S62170650 U JPS62170650 U JP S62170650U JP 5881386 U JP5881386 U JP 5881386U JP 5881386 U JP5881386 U JP 5881386U JP S62170650 U JPS62170650 U JP S62170650U

Authority

JP

Japan

Prior art keywords

insulating film

channel region

gate electrode

region

corner

Prior art date

1986-04-21

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 239000004065 semiconductor Substances 0.000 claims 1
• 238000010586 diagram Methods 0.000 description 4
• 238000004519 manufacturing process Methods 0.000 description 4
• 239000011229 interlayer Substances 0.000 description 1
• 238000002161 passivation Methods 0.000 description 1