JPS62170638U - - Google Patents

Info

Publication number

JPS62170638U

JPS62170638U JP5910286U JP5910286U JPS62170638U JP S62170638 U JPS62170638 U JP S62170638U JP 5910286 U JP5910286 U JP 5910286U JP 5910286 U JP5910286 U JP 5910286U JP S62170638 U JPS62170638 U JP S62170638U

Authority

JP

Japan

Prior art keywords

wiring

base

direction parallel

utility

registration request

Prior art date

1986-04-18

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 239000004065 semiconductor Substances 0.000 claims 2
• VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
• 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
• 229910052681 coesite Inorganic materials 0.000 description 1
• 229910052906 cristobalite Inorganic materials 0.000 description 1
• 239000000377 silicon dioxide Substances 0.000 description 1
• 235000012239 silicon dioxide Nutrition 0.000 description 1
• 229910052682 stishovite Inorganic materials 0.000 description 1
• 239000000758 substrate Substances 0.000 description 1
• 229910052905 tridymite Inorganic materials 0.000 description 1