JPS62170635U - - Google Patents
Info
- Publication number
- JPS62170635U JPS62170635U JP5744086U JP5744086U JPS62170635U JP S62170635 U JPS62170635 U JP S62170635U JP 5744086 U JP5744086 U JP 5744086U JP 5744086 U JP5744086 U JP 5744086U JP S62170635 U JPS62170635 U JP S62170635U
- Authority
- JP
- Japan
- Prior art keywords
- reticle
- automatic
- storage boxes
- automatically
- stores
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000032258 transport Effects 0.000 claims 2
Landscapes
- Warehouses Or Storage Devices (AREA)
Description
第１図は本考案の一実施例の斜視図である。
１…レテイクル搬送装置、２…レテイクル収納
箱、３…レテイクル、４…テーブル、５…案内機
構、６…アクチユエータ。
FIG. 1 is a perspective view of an embodiment of the present invention. DESCRIPTION OF SYMBOLS 1... Reticle conveyance device, 2... Reticle storage box, 3... Reticle, 4... Table, 5... Guide mechanism, 6... Actuator.
Claims (1)
で搬送するレテイクル搬送装置と、レテイクルを
複数枚収納するレテイクル収納箱からなるレテイ
クル自動交換装置において、前記レテイクル収納
箱が並列に並び、自動で移動する機能を設けたこ
とを特徴とするレテイクル自動交換装置。 In an automatic reticle exchange device consisting of a reticle transport device that automatically transports a reticle from a first position to a second position, and a reticle storage box that stores a plurality of reticle storage boxes, the reticle storage boxes are arranged in parallel and automatically moved. An automatic reticle changing device characterized by having a function to change the reticle.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5744086U JPS62170635U (en) | 1986-04-18 | 1986-04-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5744086U JPS62170635U (en) | 1986-04-18 | 1986-04-18 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62170635U true JPS62170635U (en) | 1987-10-29 |
Family
ID=30887141
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5744086U Pending JPS62170635U (en) | 1986-04-18 | 1986-04-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62170635U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104874553A (en) * | 2015-05-19 | 2015-09-02 | 东北大学 | Stacking and transferring mechanism for automatic sorter for PCB |
-
1986
- 1986-04-18 JP JP5744086U patent/JPS62170635U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104874553A (en) * | 2015-05-19 | 2015-09-02 | 东北大学 | Stacking and transferring mechanism for automatic sorter for PCB |
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