JPS62170629U - - Google Patents
Info
- Publication number
- JPS62170629U JPS62170629U JP5765486U JP5765486U JPS62170629U JP S62170629 U JPS62170629 U JP S62170629U JP 5765486 U JP5765486 U JP 5765486U JP 5765486 U JP5765486 U JP 5765486U JP S62170629 U JPS62170629 U JP S62170629U
- Authority
- JP
- Japan
- Prior art keywords
- exhaust
- propeller
- normal pressure
- flow meter
- controlled
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000005380 borophosphosilicate glass Substances 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5765486U JPS62170629U (fr) | 1986-04-18 | 1986-04-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5765486U JPS62170629U (fr) | 1986-04-18 | 1986-04-18 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62170629U true JPS62170629U (fr) | 1987-10-29 |
Family
ID=30887561
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5765486U Pending JPS62170629U (fr) | 1986-04-18 | 1986-04-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62170629U (fr) |
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1986
- 1986-04-18 JP JP5765486U patent/JPS62170629U/ja active Pending