JPS62170451U - - Google Patents
Info
- Publication number
- JPS62170451U JPS62170451U JP5754086U JP5754086U JPS62170451U JP S62170451 U JPS62170451 U JP S62170451U JP 5754086 U JP5754086 U JP 5754086U JP 5754086 U JP5754086 U JP 5754086U JP S62170451 U JPS62170451 U JP S62170451U
- Authority
- JP
- Japan
- Prior art keywords
- valve housing
- valve
- valve plate
- pressed against
- close
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000001105 regulatory effect Effects 0.000 claims 1
Landscapes
- Sliding Valves (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5754086U JPS62170451U (hu) | 1986-04-18 | 1986-04-18 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5754086U JPS62170451U (hu) | 1986-04-18 | 1986-04-18 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS62170451U true JPS62170451U (hu) | 1987-10-29 |
Family
ID=30887340
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP5754086U Pending JPS62170451U (hu) | 1986-04-18 | 1986-04-18 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS62170451U (hu) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2006052846A (ja) * | 2004-08-13 | 2006-02-23 | Vat Holding Ag | 二つの真空室間に配置される真空バルブの制御方法 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5324529B2 (hu) * | 1975-02-03 | 1978-07-21 | ||
JPS5650867B2 (hu) * | 1976-07-05 | 1981-12-01 |
-
1986
- 1986-04-18 JP JP5754086U patent/JPS62170451U/ja active Pending
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5324529B2 (hu) * | 1975-02-03 | 1978-07-21 | ||
JPS5650867B2 (hu) * | 1976-07-05 | 1981-12-01 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2006052846A (ja) * | 2004-08-13 | 2006-02-23 | Vat Holding Ag | 二つの真空室間に配置される真空バルブの制御方法 |