JPS62168646U - - Google Patents
Info
- Publication number
- JPS62168646U JPS62168646U JP5774086U JP5774086U JPS62168646U JP S62168646 U JPS62168646 U JP S62168646U JP 5774086 U JP5774086 U JP 5774086U JP 5774086 U JP5774086 U JP 5774086U JP S62168646 U JPS62168646 U JP S62168646U
- Authority
- JP
- Japan
- Prior art keywords
- air intake
- wall body
- surface portion
- locking surface
- view
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 4
- 238000004519 manufacturing process Methods 0.000 claims description 2
- 230000002093 peripheral effect Effects 0.000 claims 1
- 235000012431 wafers Nutrition 0.000 description 1
Landscapes
- Warehouses Or Storage Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5774086U JPS62168646U (enExample) | 1986-04-17 | 1986-04-17 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5774086U JPS62168646U (enExample) | 1986-04-17 | 1986-04-17 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62168646U true JPS62168646U (enExample) | 1987-10-26 |
Family
ID=30887712
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5774086U Pending JPS62168646U (enExample) | 1986-04-17 | 1986-04-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62168646U (enExample) |
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1986
- 1986-04-17 JP JP5774086U patent/JPS62168646U/ja active Pending