JPS62168644U - - Google Patents
Info
- Publication number
- JPS62168644U JPS62168644U JP1986055867U JP5586786U JPS62168644U JP S62168644 U JPS62168644 U JP S62168644U JP 1986055867 U JP1986055867 U JP 1986055867U JP 5586786 U JP5586786 U JP 5586786U JP S62168644 U JPS62168644 U JP S62168644U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- holder
- holder base
- holding device
- hook portion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986055867U JPS62168644U (enExample) | 1986-04-14 | 1986-04-14 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986055867U JPS62168644U (enExample) | 1986-04-14 | 1986-04-14 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62168644U true JPS62168644U (enExample) | 1987-10-26 |
Family
ID=30884167
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986055867U Pending JPS62168644U (enExample) | 1986-04-14 | 1986-04-14 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62168644U (enExample) |
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1986
- 1986-04-14 JP JP1986055867U patent/JPS62168644U/ja active Pending