JPS62168641U - - Google Patents
Info
- Publication number
- JPS62168641U JPS62168641U JP5701386U JP5701386U JPS62168641U JP S62168641 U JPS62168641 U JP S62168641U JP 5701386 U JP5701386 U JP 5701386U JP 5701386 U JP5701386 U JP 5701386U JP S62168641 U JPS62168641 U JP S62168641U
- Authority
- JP
- Japan
- Prior art keywords
- pattern
- pitch
- caliper
- scale formed
- row forming
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 2
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Length-Measuring Instruments Using Mechanical Means (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5701386U JPS62168641U (OSRAM) | 1986-04-15 | 1986-04-15 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5701386U JPS62168641U (OSRAM) | 1986-04-15 | 1986-04-15 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62168641U true JPS62168641U (OSRAM) | 1987-10-26 |
Family
ID=30886335
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5701386U Pending JPS62168641U (OSRAM) | 1986-04-15 | 1986-04-15 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62168641U (OSRAM) |
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1986
- 1986-04-15 JP JP5701386U patent/JPS62168641U/ja active Pending