JPS62168637U - - Google Patents
Info
- Publication number
- JPS62168637U JPS62168637U JP5730286U JP5730286U JPS62168637U JP S62168637 U JPS62168637 U JP S62168637U JP 5730286 U JP5730286 U JP 5730286U JP 5730286 U JP5730286 U JP 5730286U JP S62168637 U JPS62168637 U JP S62168637U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor
- reaction tube
- raw material
- vapor phase
- material gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 2
- 239000004065 semiconductor Substances 0.000 claims 3
- 239000002994 raw material Substances 0.000 claims 2
- 238000001947 vapour-phase growth Methods 0.000 claims 2
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5730286U JPS62168637U (enExample) | 1986-04-15 | 1986-04-15 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5730286U JPS62168637U (enExample) | 1986-04-15 | 1986-04-15 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62168637U true JPS62168637U (enExample) | 1987-10-26 |
Family
ID=30886887
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5730286U Pending JPS62168637U (enExample) | 1986-04-15 | 1986-04-15 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62168637U (enExample) |
-
1986
- 1986-04-15 JP JP5730286U patent/JPS62168637U/ja active Pending