JPS62168637U - - Google Patents

Info

Publication number
JPS62168637U
JPS62168637U JP5730286U JP5730286U JPS62168637U JP S62168637 U JPS62168637 U JP S62168637U JP 5730286 U JP5730286 U JP 5730286U JP 5730286 U JP5730286 U JP 5730286U JP S62168637 U JPS62168637 U JP S62168637U
Authority
JP
Japan
Prior art keywords
semiconductor
reaction tube
raw material
vapor phase
material gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5730286U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5730286U priority Critical patent/JPS62168637U/ja
Publication of JPS62168637U publication Critical patent/JPS62168637U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
JP5730286U 1986-04-15 1986-04-15 Pending JPS62168637U (enrdf_load_html_response)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5730286U JPS62168637U (enrdf_load_html_response) 1986-04-15 1986-04-15

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5730286U JPS62168637U (enrdf_load_html_response) 1986-04-15 1986-04-15

Publications (1)

Publication Number Publication Date
JPS62168637U true JPS62168637U (enrdf_load_html_response) 1987-10-26

Family

ID=30886887

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5730286U Pending JPS62168637U (enrdf_load_html_response) 1986-04-15 1986-04-15

Country Status (1)

Country Link
JP (1) JPS62168637U (enrdf_load_html_response)

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