JPS62168000U - - Google Patents

Info

Publication number
JPS62168000U
JPS62168000U JP5485986U JP5485986U JPS62168000U JP S62168000 U JPS62168000 U JP S62168000U JP 5485986 U JP5485986 U JP 5485986U JP 5485986 U JP5485986 U JP 5485986U JP S62168000 U JPS62168000 U JP S62168000U
Authority
JP
Japan
Prior art keywords
piston
gas holder
sealing material
side plate
detection device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5485986U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5485986U priority Critical patent/JPS62168000U/ja
Publication of JPS62168000U publication Critical patent/JPS62168000U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Examining Or Testing Airtightness (AREA)
  • Measuring Volume Flow (AREA)
JP5485986U 1986-04-14 1986-04-14 Pending JPS62168000U (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5485986U JPS62168000U (de) 1986-04-14 1986-04-14

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5485986U JPS62168000U (de) 1986-04-14 1986-04-14

Publications (1)

Publication Number Publication Date
JPS62168000U true JPS62168000U (de) 1987-10-24

Family

ID=30882239

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5485986U Pending JPS62168000U (de) 1986-04-14 1986-04-14

Country Status (1)

Country Link
JP (1) JPS62168000U (de)

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