JPS62167872U - - Google Patents
Info
- Publication number
- JPS62167872U JPS62167872U JP5511986U JP5511986U JPS62167872U JP S62167872 U JPS62167872 U JP S62167872U JP 5511986 U JP5511986 U JP 5511986U JP 5511986 U JP5511986 U JP 5511986U JP S62167872 U JPS62167872 U JP S62167872U
- Authority
- JP
- Japan
- Prior art keywords
- cryopanel
- cryopump
- refrigerant
- insulation plate
- heat exchangers
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000003507 refrigerant Substances 0.000 claims description 5
- 238000009413 insulation Methods 0.000 claims 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 3
- 239000001307 helium Substances 0.000 description 3
- 229910052734 helium Inorganic materials 0.000 description 3
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 3
- 239000007788 liquid Substances 0.000 description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
Landscapes
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5511986U JPS62167872U (enExample) | 1986-04-12 | 1986-04-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5511986U JPS62167872U (enExample) | 1986-04-12 | 1986-04-12 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62167872U true JPS62167872U (enExample) | 1987-10-24 |
Family
ID=30882733
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5511986U Pending JPS62167872U (enExample) | 1986-04-12 | 1986-04-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62167872U (enExample) |
-
1986
- 1986-04-12 JP JP5511986U patent/JPS62167872U/ja active Pending