JPS62167872U - - Google Patents

Info

Publication number
JPS62167872U
JPS62167872U JP5511986U JP5511986U JPS62167872U JP S62167872 U JPS62167872 U JP S62167872U JP 5511986 U JP5511986 U JP 5511986U JP 5511986 U JP5511986 U JP 5511986U JP S62167872 U JPS62167872 U JP S62167872U
Authority
JP
Japan
Prior art keywords
cryopanel
cryopump
refrigerant
insulation plate
heat exchangers
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5511986U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5511986U priority Critical patent/JPS62167872U/ja
Publication of JPS62167872U publication Critical patent/JPS62167872U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
JP5511986U 1986-04-12 1986-04-12 Pending JPS62167872U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5511986U JPS62167872U (enrdf_load_stackoverflow) 1986-04-12 1986-04-12

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5511986U JPS62167872U (enrdf_load_stackoverflow) 1986-04-12 1986-04-12

Publications (1)

Publication Number Publication Date
JPS62167872U true JPS62167872U (enrdf_load_stackoverflow) 1987-10-24

Family

ID=30882733

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5511986U Pending JPS62167872U (enrdf_load_stackoverflow) 1986-04-12 1986-04-12

Country Status (1)

Country Link
JP (1) JPS62167872U (enrdf_load_stackoverflow)

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