JPS62167535U - - Google Patents
Info
- Publication number
- JPS62167535U JPS62167535U JP5735686U JP5735686U JPS62167535U JP S62167535 U JPS62167535 U JP S62167535U JP 5735686 U JP5735686 U JP 5735686U JP 5735686 U JP5735686 U JP 5735686U JP S62167535 U JPS62167535 U JP S62167535U
- Authority
- JP
- Japan
- Prior art keywords
- processing
- chamber
- processing chamber
- supplied
- processing material
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Threshing Machine Elements (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5735686U JPS62167535U (nl) | 1986-04-16 | 1986-04-16 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5735686U JPS62167535U (nl) | 1986-04-16 | 1986-04-16 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS62167535U true JPS62167535U (nl) | 1987-10-24 |
Family
ID=30886981
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP5735686U Pending JPS62167535U (nl) | 1986-04-16 | 1986-04-16 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS62167535U (nl) |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4835101A (nl) * | 1971-09-07 | 1973-05-23 |
-
1986
- 1986-04-16 JP JP5735686U patent/JPS62167535U/ja active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4835101A (nl) * | 1971-09-07 | 1973-05-23 |