JPS62167159U - - Google Patents
Info
- Publication number
- JPS62167159U JPS62167159U JP5620586U JP5620586U JPS62167159U JP S62167159 U JPS62167159 U JP S62167159U JP 5620586 U JP5620586 U JP 5620586U JP 5620586 U JP5620586 U JP 5620586U JP S62167159 U JPS62167159 U JP S62167159U
- Authority
- JP
- Japan
- Prior art keywords
- sample
- gas
- substrate
- sprays
- reactive
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Analysing Materials By The Use Of Radiation (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5620586U JPS62167159U (enExample) | 1986-04-15 | 1986-04-15 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5620586U JPS62167159U (enExample) | 1986-04-15 | 1986-04-15 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62167159U true JPS62167159U (enExample) | 1987-10-23 |
Family
ID=30884808
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5620586U Pending JPS62167159U (enExample) | 1986-04-15 | 1986-04-15 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62167159U (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008203046A (ja) * | 2007-02-19 | 2008-09-04 | National Institute Of Advanced Industrial & Technology | 精密薄膜分析装置 |
-
1986
- 1986-04-15 JP JP5620586U patent/JPS62167159U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008203046A (ja) * | 2007-02-19 | 2008-09-04 | National Institute Of Advanced Industrial & Technology | 精密薄膜分析装置 |