JPS62167140U - - Google Patents

Info

Publication number
JPS62167140U
JPS62167140U JP5595186U JP5595186U JPS62167140U JP S62167140 U JPS62167140 U JP S62167140U JP 5595186 U JP5595186 U JP 5595186U JP 5595186 U JP5595186 U JP 5595186U JP S62167140 U JPS62167140 U JP S62167140U
Authority
JP
Japan
Prior art keywords
moving part
main body
chamber
range beam
spacer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5595186U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5595186U priority Critical patent/JPS62167140U/ja
Publication of JPS62167140U publication Critical patent/JPS62167140U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Measuring Fluid Pressure (AREA)
JP5595186U 1986-04-14 1986-04-14 Pending JPS62167140U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5595186U JPS62167140U (enrdf_load_stackoverflow) 1986-04-14 1986-04-14

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5595186U JPS62167140U (enrdf_load_stackoverflow) 1986-04-14 1986-04-14

Publications (1)

Publication Number Publication Date
JPS62167140U true JPS62167140U (enrdf_load_stackoverflow) 1987-10-23

Family

ID=30884323

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5595186U Pending JPS62167140U (enrdf_load_stackoverflow) 1986-04-14 1986-04-14

Country Status (1)

Country Link
JP (1) JPS62167140U (enrdf_load_stackoverflow)

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