JPS62167139U - - Google Patents

Info

Publication number

JPS62167139U

JPS62167139U JP5595286U JP5595286U JPS62167139U JP S62167139 U JPS62167139 U JP S62167139U JP 5595286 U JP5595286 U JP 5595286U JP 5595286 U JP5595286 U JP 5595286U JP S62167139 U JPS62167139 U JP S62167139U

Authority

JP

Japan

Prior art keywords

chamber

main body

diaphragm

barrier

support plate

Prior art date

1986-04-14

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 230000004888 barrier function Effects 0.000 claims description 7
• 239000007788 liquid Substances 0.000 claims description 4
• 238000001514 detection method Methods 0.000 claims description 3
• 238000006073 displacement reaction Methods 0.000 claims description 3
• 230000002093 peripheral effect Effects 0.000 claims 1
• 238000010586 diagram Methods 0.000 description 3
• 238000007789 sealing Methods 0.000 description 1