JPS62165842U - - Google Patents

Info

Publication number
JPS62165842U
JPS62165842U JP5379686U JP5379686U JPS62165842U JP S62165842 U JPS62165842 U JP S62165842U JP 5379686 U JP5379686 U JP 5379686U JP 5379686 U JP5379686 U JP 5379686U JP S62165842 U JPS62165842 U JP S62165842U
Authority
JP
Japan
Prior art keywords
chisel
fixture
shaft
arc
polishing machine
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5379686U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0518045Y2 (US06299757-20011009-C00006.png
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5379686U priority Critical patent/JPH0518045Y2/ja
Publication of JPS62165842U publication Critical patent/JPS62165842U/ja
Application granted granted Critical
Publication of JPH0518045Y2 publication Critical patent/JPH0518045Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP5379686U 1986-04-10 1986-04-10 Expired - Lifetime JPH0518045Y2 (US06299757-20011009-C00006.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5379686U JPH0518045Y2 (US06299757-20011009-C00006.png) 1986-04-10 1986-04-10

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5379686U JPH0518045Y2 (US06299757-20011009-C00006.png) 1986-04-10 1986-04-10

Publications (2)

Publication Number Publication Date
JPS62165842U true JPS62165842U (US06299757-20011009-C00006.png) 1987-10-21
JPH0518045Y2 JPH0518045Y2 (US06299757-20011009-C00006.png) 1993-05-13

Family

ID=30880189

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5379686U Expired - Lifetime JPH0518045Y2 (US06299757-20011009-C00006.png) 1986-04-10 1986-04-10

Country Status (1)

Country Link
JP (1) JPH0518045Y2 (US06299757-20011009-C00006.png)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01166057U (US06299757-20011009-C00006.png) * 1988-05-16 1989-11-21
JPH0338051A (ja) * 1989-06-29 1991-02-19 Applied Materials Inc 半導体ウェーハのハンドリング方法及び装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01166057U (US06299757-20011009-C00006.png) * 1988-05-16 1989-11-21
JPH0338051A (ja) * 1989-06-29 1991-02-19 Applied Materials Inc 半導体ウェーハのハンドリング方法及び装置

Also Published As

Publication number Publication date
JPH0518045Y2 (US06299757-20011009-C00006.png) 1993-05-13

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