JPS62165507U - - Google Patents

Info

Publication number
JPS62165507U
JPS62165507U JP3006986U JP3006986U JPS62165507U JP S62165507 U JPS62165507 U JP S62165507U JP 3006986 U JP3006986 U JP 3006986U JP 3006986 U JP3006986 U JP 3006986U JP S62165507 U JPS62165507 U JP S62165507U
Authority
JP
Japan
Prior art keywords
film thickness
light
receives
photodetector
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3006986U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3006986U priority Critical patent/JPS62165507U/ja
Publication of JPS62165507U publication Critical patent/JPS62165507U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
JP3006986U 1986-03-04 1986-03-04 Pending JPS62165507U (US20070167544A1-20070719-C00007.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3006986U JPS62165507U (US20070167544A1-20070719-C00007.png) 1986-03-04 1986-03-04

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3006986U JPS62165507U (US20070167544A1-20070719-C00007.png) 1986-03-04 1986-03-04

Publications (1)

Publication Number Publication Date
JPS62165507U true JPS62165507U (US20070167544A1-20070719-C00007.png) 1987-10-21

Family

ID=30834541

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3006986U Pending JPS62165507U (US20070167544A1-20070719-C00007.png) 1986-03-04 1986-03-04

Country Status (1)

Country Link
JP (1) JPS62165507U (US20070167544A1-20070719-C00007.png)

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