JPS62163935U - - Google Patents

Info

Publication number
JPS62163935U
JPS62163935U JP5240786U JP5240786U JPS62163935U JP S62163935 U JPS62163935 U JP S62163935U JP 5240786 U JP5240786 U JP 5240786U JP 5240786 U JP5240786 U JP 5240786U JP S62163935 U JPS62163935 U JP S62163935U
Authority
JP
Japan
Prior art keywords
semiconductor wafer
processing tank
wafer processing
shaped groove
utility
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5240786U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5240786U priority Critical patent/JPS62163935U/ja
Publication of JPS62163935U publication Critical patent/JPS62163935U/ja
Pending legal-status Critical Current

Links

Landscapes

  • ing And Chemical Polishing (AREA)
  • Weting (AREA)
JP5240786U 1986-04-07 1986-04-07 Pending JPS62163935U (US20030220297A1-20031127-C00074.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5240786U JPS62163935U (US20030220297A1-20031127-C00074.png) 1986-04-07 1986-04-07

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5240786U JPS62163935U (US20030220297A1-20031127-C00074.png) 1986-04-07 1986-04-07

Publications (1)

Publication Number Publication Date
JPS62163935U true JPS62163935U (US20030220297A1-20031127-C00074.png) 1987-10-17

Family

ID=30877550

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5240786U Pending JPS62163935U (US20030220297A1-20031127-C00074.png) 1986-04-07 1986-04-07

Country Status (1)

Country Link
JP (1) JPS62163935U (US20030220297A1-20031127-C00074.png)

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