JPS62163784U - - Google Patents

Info

Publication number

JPS62163784U

JPS62163784U JP5239586U JP5239586U JPS62163784U JP S62163784 U JPS62163784 U JP S62163784U JP 5239586 U JP5239586 U JP 5239586U JP 5239586 U JP5239586 U JP 5239586U JP S62163784 U JPS62163784 U JP S62163784U

Authority

JP

Japan

Prior art keywords

measurement chamber

liquid nitrogen

radiation

measurement

purge

Prior art date

1986-04-08

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 7
• 238000005259 measurement Methods 0.000 claims description 5
• 230000005855 radiation Effects 0.000 claims description 4
• 239000007788 liquid Substances 0.000 claims description 3
• 229910052757 nitrogen Inorganic materials 0.000 claims description 3
• 239000007789 gas Substances 0.000 claims description 2
• 239000004065 semiconductor Substances 0.000 claims description 2
• 238000010926 purge Methods 0.000 claims 1
• 229910001873 dinitrogen Inorganic materials 0.000 description 1

Cited By (1)