JPS62162854U - - Google Patents

Info

Publication number

JPS62162854U

JPS62162854U JP5004486U JP5004486U JPS62162854U JP S62162854 U JPS62162854 U JP S62162854U JP 5004486 U JP5004486 U JP 5004486U JP 5004486 U JP5004486 U JP 5004486U JP S62162854 U JPS62162854 U JP S62162854U

Authority

JP

Japan

Prior art keywords

diaphragm

semiconductor

pressure sensor

type gauge

stress generated

Prior art date

1986-04-03

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 239000004065 semiconductor Substances 0.000 claims description 4
• 238000005259 measurement Methods 0.000 claims 1
• 230000035945 sensitivity Effects 0.000 claims 1
• 238000010586 diagram Methods 0.000 description 3
• 238000000034 method Methods 0.000 description 2
• 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
• 229920005591 polysilicon Polymers 0.000 description 1