JPS62162834U - - Google Patents
Info
- Publication number
- JPS62162834U JPS62162834U JP5134686U JP5134686U JPS62162834U JP S62162834 U JPS62162834 U JP S62162834U JP 5134686 U JP5134686 U JP 5134686U JP 5134686 U JP5134686 U JP 5134686U JP S62162834 U JPS62162834 U JP S62162834U
- Authority
- JP
- Japan
- Prior art keywords
- pressure cvd
- low pressure
- cvd apparatus
- gas inlet
- reaction tube
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004518 low pressure chemical vapour deposition Methods 0.000 claims description 4
- 230000007423 decrease Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5134686U JPS62162834U (fr) | 1986-04-04 | 1986-04-04 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5134686U JPS62162834U (fr) | 1986-04-04 | 1986-04-04 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS62162834U true JPS62162834U (fr) | 1987-10-16 |
Family
ID=30875518
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP5134686U Pending JPS62162834U (fr) | 1986-04-04 | 1986-04-04 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS62162834U (fr) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN105408696A (zh) * | 2014-06-30 | 2016-03-16 | 日立空调·家用电器株式会社 | 空气调节装置 |
-
1986
- 1986-04-04 JP JP5134686U patent/JPS62162834U/ja active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN105408696A (zh) * | 2014-06-30 | 2016-03-16 | 日立空调·家用电器株式会社 | 空气调节装置 |
CN105408696B (zh) * | 2014-06-30 | 2018-07-06 | 日立江森自控空调有限公司 | 空气调节装置 |