JPS62162382U - - Google Patents
Info
- Publication number
- JPS62162382U JPS62162382U JP4971386U JP4971386U JPS62162382U JP S62162382 U JPS62162382 U JP S62162382U JP 4971386 U JP4971386 U JP 4971386U JP 4971386 U JP4971386 U JP 4971386U JP S62162382 U JPS62162382 U JP S62162382U
- Authority
- JP
- Japan
- Prior art keywords
- panel
- less
- cryopump
- cooled
- freezing source
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000008014 freezing Effects 0.000 claims 2
- 238000007710 freezing Methods 0.000 claims 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims 1
- 229910052782 aluminium Inorganic materials 0.000 claims 1
Landscapes
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4971386U JPS62162382U (cs) | 1986-04-04 | 1986-04-04 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4971386U JPS62162382U (cs) | 1986-04-04 | 1986-04-04 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62162382U true JPS62162382U (cs) | 1987-10-15 |
Family
ID=30872420
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4971386U Pending JPS62162382U (cs) | 1986-04-04 | 1986-04-04 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62162382U (cs) |
-
1986
- 1986-04-04 JP JP4971386U patent/JPS62162382U/ja active Pending