JPS62162255U - - Google Patents
Info
- Publication number
- JPS62162255U JPS62162255U JP5075386U JP5075386U JPS62162255U JP S62162255 U JPS62162255 U JP S62162255U JP 5075386 U JP5075386 U JP 5075386U JP 5075386 U JP5075386 U JP 5075386U JP S62162255 U JPS62162255 U JP S62162255U
- Authority
- JP
- Japan
- Prior art keywords
- sputtering
- opening
- film thickness
- shutter
- control plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004544 sputter deposition Methods 0.000 claims 7
- 239000000758 substrate Substances 0.000 claims 2
- 239000000463 material Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5075386U JPS62162255U (Direct) | 1986-04-04 | 1986-04-04 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5075386U JPS62162255U (Direct) | 1986-04-04 | 1986-04-04 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62162255U true JPS62162255U (Direct) | 1987-10-15 |
Family
ID=30874397
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5075386U Pending JPS62162255U (Direct) | 1986-04-04 | 1986-04-04 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62162255U (Direct) |
-
1986
- 1986-04-04 JP JP5075386U patent/JPS62162255U/ja active Pending