JPS62160830U - - Google Patents

Info

Publication number
JPS62160830U
JPS62160830U JP5038186U JP5038186U JPS62160830U JP S62160830 U JPS62160830 U JP S62160830U JP 5038186 U JP5038186 U JP 5038186U JP 5038186 U JP5038186 U JP 5038186U JP S62160830 U JPS62160830 U JP S62160830U
Authority
JP
Japan
Prior art keywords
handling
processing
processing chamber
machine
chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5038186U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0541643Y2 (https=
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986050381U priority Critical patent/JPH0541643Y2/ja
Publication of JPS62160830U publication Critical patent/JPS62160830U/ja
Application granted granted Critical
Publication of JPH0541643Y2 publication Critical patent/JPH0541643Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Threshing Machine Elements (AREA)
JP1986050381U 1986-04-04 1986-04-04 Expired - Lifetime JPH0541643Y2 (https=)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986050381U JPH0541643Y2 (https=) 1986-04-04 1986-04-04

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986050381U JPH0541643Y2 (https=) 1986-04-04 1986-04-04

Publications (2)

Publication Number Publication Date
JPS62160830U true JPS62160830U (https=) 1987-10-13
JPH0541643Y2 JPH0541643Y2 (https=) 1993-10-21

Family

ID=30873692

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986050381U Expired - Lifetime JPH0541643Y2 (https=) 1986-04-04 1986-04-04

Country Status (1)

Country Link
JP (1) JPH0541643Y2 (https=)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50142353A (https=) * 1974-04-26 1975-11-17
JPS57129332U (https=) * 1981-02-05 1982-08-12

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50142353A (https=) * 1974-04-26 1975-11-17
JPS57129332U (https=) * 1981-02-05 1982-08-12

Also Published As

Publication number Publication date
JPH0541643Y2 (https=) 1993-10-21

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