JPS62160830U - - Google Patents

Info

Publication number
JPS62160830U
JPS62160830U JP5038186U JP5038186U JPS62160830U JP S62160830 U JPS62160830 U JP S62160830U JP 5038186 U JP5038186 U JP 5038186U JP 5038186 U JP5038186 U JP 5038186U JP S62160830 U JPS62160830 U JP S62160830U
Authority
JP
Japan
Prior art keywords
handling
processing
processing chamber
machine
chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5038186U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0541643Y2 (enExample
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986050381U priority Critical patent/JPH0541643Y2/ja
Publication of JPS62160830U publication Critical patent/JPS62160830U/ja
Application granted granted Critical
Publication of JPH0541643Y2 publication Critical patent/JPH0541643Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Threshing Machine Elements (AREA)
JP1986050381U 1986-04-04 1986-04-04 Expired - Lifetime JPH0541643Y2 (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986050381U JPH0541643Y2 (enExample) 1986-04-04 1986-04-04

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986050381U JPH0541643Y2 (enExample) 1986-04-04 1986-04-04

Publications (2)

Publication Number Publication Date
JPS62160830U true JPS62160830U (enExample) 1987-10-13
JPH0541643Y2 JPH0541643Y2 (enExample) 1993-10-21

Family

ID=30873692

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986050381U Expired - Lifetime JPH0541643Y2 (enExample) 1986-04-04 1986-04-04

Country Status (1)

Country Link
JP (1) JPH0541643Y2 (enExample)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50142353A (enExample) * 1974-04-26 1975-11-17
JPS57129332U (enExample) * 1981-02-05 1982-08-12

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50142353A (enExample) * 1974-04-26 1975-11-17
JPS57129332U (enExample) * 1981-02-05 1982-08-12

Also Published As

Publication number Publication date
JPH0541643Y2 (enExample) 1993-10-21

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