JPS62160691U - - Google Patents

Info

Publication number

JPS62160691U

JPS62160691U JP4910986U JP4910986U JPS62160691U JP S62160691 U JPS62160691 U JP S62160691U JP 4910986 U JP4910986 U JP 4910986U JP 4910986 U JP4910986 U JP 4910986U JP S62160691 U JPS62160691 U JP S62160691U

Authority

JP

Japan

Prior art keywords

substrate

dry air

pressure

injection device

pressure water

Prior art date

1986-04-02

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 239000000758 substrate Substances 0.000 claims description 11
• 238000002347 injection Methods 0.000 claims description 5
• 239000007924 injection Substances 0.000 claims description 5
• XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 5
• 238000004140 cleaning Methods 0.000 claims description 4
• 238000010586 diagram Methods 0.000 description 1

Cited By (1)