JPS62160400U

JPS62160400U -

Info

Publication number: JPS62160400U
Application number: JP4878986U
Authority: JP
Priority date: 1986-03-31
Filing date: 1986-03-31
Publication date: 1987-10-12

Description

[Brief explanation of the drawing]

第１図は本考案の一実施例を示す断面図、第２
図は従来のターゲツトチエンバを示す正面図、第
３図は従来のターゲツトチエンバの他の例を示す
斜視図である。１２……ターゲツトチエンバ本体、１４―１〜
１４―３……金属フオイル、１６―１〜１６―３
……室、１８―１〜１８―３……原料供給口、２
０―１〜２０―３……Ｒ生成物取出し口、２２
―１，２２―２……弁。 Fig. 1 is a sectional view showing one embodiment of the present invention;
This figure is a front view showing a conventional target chamber, and FIG. 3 is a perspective view showing another example of the conventional target chamber. 12...Target chamber body, 14-1~
14-3...Metal foil, 16-1 to 16-3
...Room, 18-1 to 18-3...Raw material supply port, 2
0-1 to 20-3...R product outlet, 22
-1,22-2...Valve.

Claims

[Claims for Utility Model Registration] A cylindrical target chamber is partitioned by a plurality of metal foils so that a plurality of chambers are arranged in the axial direction of the tube, and each chamber partitioned by the metal foil and the target chamber wall. The chamber is provided with a raw material supply port and a product take-out port, and at least the chambers other than the innermost chamber are provided with mutually independent exhaust systems, and while the particle beam is irradiated through the metal foil, the raw material is supplied to the necessary chambers. A target chamber characterized by filling or flowing.